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2019-01-01T17:55:17-05:00
Evaluation of Thermal and Radiation Induced Chemistries of Metal Oxo–Hydroxo Clusters for Next-Generation Nanoscale Inorganic Resists
10.1021/acsanm.8b00865
American Chemical Society
Richard P. Oleksak
Rose E. Ruther
Feixiang Luo
Jennie M. Amador
Shawn R. Decker
Milton N. Jackson
Joshua R. Motley
Jason K. Stowers
Darren W. Johnson
Eric L. Garfunkel
Douglas A. Keszler
Gregory S. Herman
application/pdf
research-article
© 2018 American Chemical Society
American Chemical Society
True
© 2018 American Chemical Society
© 2018 American Chemical Society
Issue
10.1021/acsanm.8b00865
VoR
08/20/2018
1
9
4548
4556
© 2018 American Chemical Society
article
2574-0970
2574-0970
ACS Applied Nano Materials
research-article
Issue10.1021/acsanm.8b00865VoR
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